|  |  |  |  |
| 200MM P-Chuck | 0010-2025 ASSY ORIENTER ROTATION | 0020-28754 200mm A101 Pedestal | 0020- 27123 PCII Chamber Pedestal
| 0021-20788 200MM ESC Low Shield |
 |  |  |  |  |
0020-27190 200MM Upper Shield | 0020-22844 200MM Preclean Pedestal shield | 0020-27455 DISK 8''ADVANCED 101 SHUTTER | 0240-75104 HTF WRIST ASSEMBLY | 0010- 24774 AMAT 300MM ESC |
 |  |  |  |  |
839-019090-374 LAM 374 ESC 300MM | 839-019080-608 LAM 608 ESC 300MM | 0020-02520 Gas box | 0020-22982 Adapter | 0021-01813 &0021-03568 Shower Head |
 |  |  |  |  |
0040-00796 Gas box | 0040-32001 Feed Thru | 0040-22422 PEDESTAL,COOLDOWN | 0020-22414 CHUCK,TC | 0020-90540(0020-22387) HOOP WITH TC |
