Spare Parts(200MM&300MM)
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0010-2025

ASSY ORIENTER ROTATION  

0020-28754

200mm A101 Pedestal

0020- 27123

PCII Chamber Pedestal 

0021-20788 

200MM ESC Low Shield

200MM Upper Shield

0020-22844

200MM Preclean Pedestal shield

DISK 8''ADVANCED 101 SHUTTER

0240-75104                                    

HTF WRIST ASSEMBLY

0010- 24774                           

AMAT  300MM  ESC

839-019090-374

LAM 374 ESC 300MM

 839-019080-608

LAM 608 ESC  300MM

0020-02520

Gas box

0020-22982

Adapter

0021-01813 &0021-03568

Shower Head              

0040-00796

Gas box

 0040-32001

 Feed Thru

0040-22422

PEDESTAL,COOLDOWN

0020-22414

CHUCK,TC

0020-90540(0020-22387)

 HOOP WITH TC

DXZ   Chamber Body

0021-09787

DXZ LID PumpingPlate

0020-22982

Adapter

0021-35087

BlockerPlate

0040-02205

ProducerLID

0040-01546,0040-01547

0040-02816,0040-02817

0040-47723,0040-47724

Block R,L

0040-00796

GasBox

0040-02520

GasBox

0021-01813

0021-03568

ShowerHead

0021-03637

ShowerHead

0040-32001

FeedThru

0021-04298

Insert

0045-00126

Channel

0040-32449

AMT 5200 ChamberLID

0021-38119

Face Plate CenturaHole

0021-00042

DXZ ShowerHead

0021-35744

TXZ BafflePlate

0020-42287

BW ShowerHead

0020-42285

BW BafflePlate

153-00001-00

Slit V/VDoor

303-05091

MATTSON RobotPaddle

263-13414-00

ShowerHead

0021-03489

ShowerHead

0021-03489-P2

ShowerHead

0040-02818

MixingBlock

32060-00

Vac.ChuckGenus

0010-02616

Gas Ring18-Nozzle

0040-09091

P5000 GasBox

15-00700-00

Plate Fork RetainerB

0021-38791

Insert Ring AlLiner

0020-27123

PCII Chamber Pedestal

0020-27455

DISK 8''ADVANCED 101 SHUTTER

0021-20788

SHIELD, 8, 101% AL